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Features
- Compact footprint
- Single axis - 10 or 20 microns
- Closed loop control
- Ultra-low noise performance
- Picometer positioning resolution
- High speed
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Typical Applications
- High speed, high resolution positioning
- Metrology
- AFM
- SPM
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Product Description |
The Nano-MET10 and Nano-MET20 are compact, single axis nanopositioning systems with exceptional resonant frequency and low noise characteristics. The Nano-MET10 and Nano-MET20 have picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control.
The low noise characteristics and high resonant frequencies make it ideal for demanding metrology applications that require noise floors less than 10 picometers and high speed performance. Related products include the Nano-METZ, Nano-MET2 and Nano- MET3 nanopositioning systems.
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Technical Specifications |
| Range of motion (Nano-MET10) |
10 μm |
Range of motion (Nano-MET20)
|
20 μm |
| Resolution (Nano-MET10) |
0.01 nm |
| Resolution (Nano-MET20) |
0.02 nm |
| Resonant Frequency |
4.6 kHz |
| Recommended max. load (horizontal)* |
100 g |
| Recommended max. load (vertical)* |
100 kg |
| Body Material |
Aluminum |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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phone: 608.298.0855 fax: 608.298.9525
Copyright © 2014 | | |
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