Product Description

The Nano-M250 is a compact, two axis nanopositioning system constructed from titanium or invar. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The 0.5” center aperture provides a convienent optical pathway or feedthrough for probe assemblies. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models.

Technical Specifications
Range of motion (XY)	50 μm x 50 μm
Resolution	0.1 nm
Resonant Frequency (X)	1.0 kHz ±20%
Resonant Frequency (Y)	700 Hz ±20%
Stiffness	1.0 N/μm
θ _roll, θ _pitch (typical)	≤1 μrad
θ _yaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Invar or Titanium
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-M250 Drawing	Nano-M250 Catalog Pages

Product Description

Technical Specifications

Additional Information

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