燃烧流体测量设备分站

北京欧兰科技发展有限公司

 




Features
  • High speed, multi-axis
  • XY and XYZ configurations
  • Z-axis step response time down to 2ms
  • Z-axis scans up to 300 Hz
  • Closed loop control
  • Picometer positioning resolution
  • High stability


Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • AFM
  • SPM



Product Description

The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM.



Technical Specifications

Range of motion (XYZ) 10 μm
Resolution
0.01 nm
XY (HS2) Resonant Frequency 1.5 kHz ±20%
XY (HS3) Resonant Frequency 1.0 kHz ±20%
Z (HS3) Resonant Frequency 5.0 kHz ±20%
Scanning Speed up to 300 Hz
Stiffness (Z-axis) 8 N/μm
Recommended max. load (horizontal)* 0.1 kg
Recommended max. load (vertical)* 0.1 kg
Body Material Al, Invar or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Position Noise Spectrum

The Nano-HS Series demonstrates less than 2 picometers of position noise. Click below to enlarge and view the data for all three axes.



Additional Information

Nano-HS2 Drawing


Nano-HS3 Drawing

Nano-HS Series Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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