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If smallest parts or samples have to be moved or positioned with nanometer precision in the millimetre range, nanopositioning systems with piezo inertial drive are used. Very compact actors with appropriate control units are available for rotational and linear movements.
The compatibility to each other allows the assembly of multi-axes combinations for complex movements.

线形位移台
升降, 提升位移台
旋转台
角位台
控制系统
 
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