Ultra-Robust 8.5 mJ Excimer Laser

• Compact modular construction with remote control
• Air cooled
• Short, high peak power pulses
• Variable output energy
• Long thyratron lifetime

Applications

• Photoablation and Micromachining
• Fiber Bragg grating writing
• Semiconductor processing
• Surface analysis
• Laser ionization mass spectroscopy
• Fluorescence spectroscopy
• Photochemistry
• Relaxation time studies
• Non-linear optics

Laser Medium1	F2	ArF	KrF
Wavelength	157	193	248	nm
Max. Pulse Energy2	1.3	7	8.5	mJ
Pulse Energy Adjustment Range	50 to 100	50 to 100	30 to 100	%
Max. Peak Power2	n.m.	1.75	1.70	MW
Max. Average Power 3	270	1400	2000	mW
Max. Repetition Rate	300	300	300	Hz
Pulse Duration	n.m.	4	5	ns
Pulse-to-pulse Stability	3	3	3	%
Beam Dimensions (V x H)	2.1 x 2.3	3 x 3	4 x3	mm
Beam Divergence (V x H)	1.5 x 1.2	1.5 x 1.2	6.5 x 1.5	mrad

¹ For KrCl (222nm), XeCl (308nm), XeF (351nm) please call.
² Measured at 25 Hz
³ Measured at 300 Hz