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Excimer Laser - ASX-750

High-Performance 350mJ Excimer

The ASX-750 is an afford able, high-performance excimer laser designed for research and light industrial applications. It offers pulse energies up to 360 mJ and average powers to 20 W (KrF). Owing to an innovative pre-ionization scheme, the ASX-750 exhibits excellent beam uniformity, unsurpassed pulse-to-pulse stability (better than ± 2% for 100% of all pulses, even at repetition rates below 1 Hz) and timing jitter less than ± 2 ns.

  • Soft, corona pre-ionization
  • Efficient micro-particle filter
  • Long thyratron life (>3 x 108 pulses)
  • Pulse energies up to 360 mJ (at 248nm)
  • Repetition rates up to 60Hz
  • Excellent beam quality and pulse-to-pulse stability
  • Easy installation and operation
  • Easy and quick gas refilling
  • Single-phase AC power

Applications

  • Fiber Bragg grating writing
  • Spectroscopy
  • Photochemistry
  • Dye laser pumping
  • Materials processing investigations
Laser Medium

ArF

KrF

XeCl

XeF

units

Wavelength

193

248

308

351

nm

Max. Pulse Energy1

220

360

270

140

mJ

Max. Repetition Rate

60

Hz

Max. Average Power2

10

20

15

8

W

Pulse-to-pulse Stability3

+ 3

+ 2

+ 2

+ 2

%


1 Measured at 10 Hz

2 Measured at maximum repetition rate

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