|
Features
- High speed, multi-axis
- XY and XYZ configurations
- Z-axis step response time down to 2ms
- Z-axis scans up to 300 Hz
- Closed loop control
- Picometer positioning resolution
- High stability
|
Typical Applications
- High speed, high resolution positioning
- Metrology
- AFM
- SPM
|  
Product Description |
The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM. For an XYZ system with even higher speed Z, see the Nano-HS3M.
 |
Technical Specifications |
| Range of motion (XYZ) |
10 μm |
Resolution
|
0.01 nm |
| XY (HS2) Resonant Frequency |
1.5 kHz ±20% |
| XY (HS3) Resonant Frequency |
1.0 kHz ±20% |
| Z (HS3) Resonant Frequency |
5.0 kHz ±20% |
| Scanning Speed |
up to 300 Hz |
| Stiffness (Z-axis) |
8 N/μm |
| Recommended max. load (horizontal)* |
0.1 kg |
| Recommended max. load (vertical)* |
0.1 kg |
| Body Material |
Al, Invar or Titanium |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
Position Noise Spectrum |
| The Nano-HS Series demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis. |
|
|
|
|
|
|
phone: 608.298.0855 fax: 608.298.9525
Copyright © 2014 | | |
公司新闻
