燃烧流体测量设备分站

北京欧兰科技发展有限公司

 





Features
  • Ultra-fast response
  • Femtometer noise floor
  • High stability
  • Closed loop control
  • Compact size
  • Picometer positioning resolution


Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • AFM
  • SPM



Product Description

The Nano-METZ is a compact z-axis nanopositioning system designed for high speed scanning and ultra-low noise characteristics for demanding AFM and metrology applications. The innovative design of the Nano- METZ coupled with our proprietary PicoQ® sensor technology yields a resonant frequency of 14.5kHz and a noise floor of 400 femtometers/√Hz. The result: unparalled speed, response and precision for the most demanding and discerning metrology applications. Related products include the Nano-HS3M, Nano-MET2, Nano-MET3, Nano- MET10 and Nano-MET20 nanopositioning systems.



Technical Specifications

Range of motion 5 μm
Resolution
0.005 nm
Resonant Frequency 14.5 kHz
Recommended max. load (horizontal)* 0.1 kg
Recommended max. load (vertical)* 0.1 kg
Body Material Aluminum or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Position Noise Spectrum

The Nano-METZ demonstrates less than 400 femtometers of position noise. Click below to enlarge and view the data.


Step Response Time

The step response time (rise time) of a Nano-METZ performing a 0.5um step with no load is 0.25ms. Click below to enlarge and view the data.



Additional Information

Nano-METZ Drawing
Nano-METZ Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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