燃烧流体测量设备分站

北京欧兰科技发展有限公司

 




Features
  • Compact footprint
  • Single axis - 10 or 20 microns
  • Closed loop control
  • Ultra-low noise performance
  • Picometer positioning resolution
  • High speed


Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • AFM
  • SPM




Product Description

The Nano-MET10 and Nano-MET20 are compact, single axis nanopositioning systems with exceptional resonant frequency and low noise characteristics. The Nano-MET10 and Nano-MET20 have picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control.

The low noise characteristics and high resonant frequencies make it ideal for demanding metrology applications that require noise floors less than 10 picometers and high speed performance. Related products include the Nano-METZ, Nano-MET2 and Nano- MET3 nanopositioning systems.



Technical Specifications

Range of motion (Nano-MET10) 10 μm
Range of motion (Nano-MET20)
20 μm
Resolution (Nano-MET10) 0.01 nm
Resolution (Nano-MET20) 0.02 nm
Resonant Frequency 4.6 kHz
Recommended max. load (horizontal)* 100 g
Recommended max. load (vertical)* 100 g
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-MET10 & Nano-MET20 Drawing


Nano-MET10 & Nano-MET20 Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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