| Product |
Description |
Axes |
Applications |
| Nano-MTA Series |
Mirror tip/tilt system with up to 5 milliradians travel for rapid scanning of laser beams with sub-microradian resolution |
1 or 2 |
high speed laser beam steering, optical trapping, active optics |
Nano-Theta
|
Rotational stage with sub-microradian resolution |
1 |
laser beam scanning, lithography, FBG writing |
| Nano-Theta/H |
Rotational stage withs 5 milliradians of total motion and a large center aperture |
1 |
polarized nanoscopy, FBG writing, lithography |
| Nano-Align3 Series |
100 µm range of motion in the Z-axis and 2 mrad in θx and θy |
3 |
microscopy, MEMS testing, wafer alignment and testing, nanomachining |
| Nano-Align5 Series |
5-axis (X, Y, Z, θx, θy) nanopositioning system with a large center aperture |
5 |
wafer alignment and testing, MEMS testing, optical aligment |
| Nano-Align6 Series |
6-axis (X, Y, Z, θx , θy, θz) nanopositioning system with a large center aperture |
6 |
optical aligment, wafer alignment, nano- and micromachining |
| Nano-M3Z |
25 µm range of motion in the Z-axis and 1 mrad in θx and θy |
3 |
optical aligment, metrology, nanolithography |
| Nano-Man5 |
50 µm range of motion in X and Y, 25 µm in Z, and 1 mrad in θx and θy |
5 |
SEM, MEMS testing, nanolithography |
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